Technology innovations 25c-2: A closer look at Samsung 3nm GAA transistors

a Normal PU transistor IS-VG electrical curve. b Abnormal PU transistor IS-VG electrical curve.

Cartoon of GAA bottom nanosheet MESA leakage.

EBIC analysis results on abnormal and normal PU transistors.

Cross-sectional TEM and EELS mapping analysis results of an abnormal PU transistor.

SNM analysis of an abnormal PU transistor.